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Vacuum
Fixture |
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Wafer Size: |
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75mm (3”) |
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100mm (4”) |
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150mm (6”) |
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Sub Jig Diameter
Max Part Clearance: |
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120mm (4.72”) |
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120mm (4.72”) |
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172mm (6.75”) |
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Gauge resolution: |
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1µm (.00004”) |
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1µm (.00004”) |
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1µm (.00004”) |
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Force Control: |
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Spring Tension & Die Weight |
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Spring Tension & Die Weight |
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Spring Tension & Die Weight |
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Maximum Force |
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3.7kg (8.15lb) |
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3.7kg (8.15lb) |
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4.7kg (10.37lb)
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Dimensions: |
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Ø170mm x
244 mmH
(6.7 x 9.61”) |
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Ø170mm x
244 mmH
(6.7 x 9.61”) |
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Ø220mm x
244 mmH
(8.7 x 9.61”) |
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Weight: |
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7.3kg (16.1lb) |
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7.3kg (16.1lb) |
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9.9kg (21.8lb) |
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Vacuum
Pump |
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Volts:
(Can be ordered in either 110 or 220) |
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110 or 220
Single Phase
60 Hz |
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110 or 220
Single Phase
60 Hz |
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110 or 220
Single Phase
60 Hz |
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Watts: |
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150 |
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150 |
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150 |
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Vacuum Meter: |
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-760 mm Hg
R 1/4 |
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-760 mm Hg
R 1/4 |
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-760 mm Hg
R 1/4 |
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Weight: |
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7.5 kg (16.5lb) |
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7.5 kg (16.5lb) |
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7.5 kg (16.5lb) |
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