Hyprez Wafer Thinning Device (WTD)

The WTD is available in sizes to handle 3”, 4” and 6” wafers and is sized to pair with industry standard lapping equipment.

Download WTD Brochure

Lapping Machines & Accessories

Hyprez Slurry and Lubes

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Process Development Assistance

Designed to accurately control thickness and parallelism of thin and delicate parts during lapping and polishing operations, the Hyprez WTD is capable of accepting a variety of product configurations. In addition, it can be used in conjunction with a parts carrier to process multiple parts in a single cycle resulting in decreased manufacturing costs.

Key Features

•	A vacuum chuck with a hardened steel support ring and digital indicator to monitor part thickness.

•	A powerful vacuum system featuring a dial gauge to monitor pressure along with a quick-connect for fast changeovers, maximizing ease of operation.

•	In addition, the free weight platform can be used as a device stand.

Robust and durable, the WTD is portable and easy to use. Upon request, Engis can provide wear resistant contact surfaces or customized sub-fixtures to accommodate your specific parts handling requirements.

Read more on Part Size Control & Parallelism


MODEL		WTD-75V	WTD-100V	WTD-150V

Vacuum Fixture	Wafer Size:	75mm (3”)	100mm (4”)	150mm (6”)

	Sub Jig Diameter Max Part Clearance:	120mm (4.72”)	120mm (4.72”)	172mm (6.75”)

	Gauge resolution:	1µm (.00004”)	1µm (.00004”)	1µm (.00004”)

	Force Control:	Spring Tension & Die Weight	Spring Tension & Die Weight	Spring Tension & Die Weight

	Maximum Force	3.7kg (8.15lb)	3.7kg (8.15lb)	4.7kg (10.37lb)

	Dimensions:	Ø170mm x 244 mmH (6.7 x 9.61”)	Ø170mm x 244 mmH (6.7 x 9.61”)	Ø170mm x 244 mmH (6.7 x 9.61”)

	Weight:	7.3kg (16.1lb)	7.3kg (16.1lb)	9.9kg (21.8lb)

Vacuum Pump	Volts: (Can be ordered in either 110 or 220)	110 or 220 Single Phase 60 Hz	110 or 220 Single Phase 60 Hz	110 or 220 Single Phase 60 Hz

	Watts:	150	150	150

	Vacuum Meter:	-760 mm Hg R 1/4	-760 mm Hg R 1/4	-760 mm Hg R 1/4

	Weight:	7.5 kg (16.5lb)	7.5 kg (16.5lb)	7.5 kg (16.5lb)

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Contact your local Engis Regional Sales Manager or Customer Service Representative.

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